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FS serie
Pneumatic drive bellows pumps

High-speed strokes

An incease in the speed of pump strokes (240 spm maximum) resulted in a reduction of size, weight and costs involved in the manufacture of the pump as well as a decrease in pulsation. Note: Pump strokes are different depending on the pump model.

Contamination free design

All of the parts which come into contact with liquid are made of fluororesin. The pump is designed so no metal portion is exposed. The exterior is also coated with fluororesin. The use of a shaft seal (patent pending), our own development, has the effect of remarkably decreasing the production of particles.

Wide range of liquid temperatures/ high-pressure discharge

As it can handle liquids with temperatures ranging from 5 - 180 C deg. with discharge pressures up to 45MPa, the pump is usable not only for cleaning processes and CMP processes but also for feeding chemical liquids.

Facility of maintenance

The proximity switch can be replaced without disassembling the pump and regular tightening of stud bolts is unnecessary, resulting in reduced downtime.

Sensor Drive System

The pump uses the sensor drive system which opens/closes the solenoid by means of a proximity switch built internally. Therefore, when connected to various controllers, the discharge can be controlled or managed easily.

Max. stroke speed240 spm
Max. discharge capacity55 L/min
Max. Air consumption670 NL/min
Main materialsPTFE, PFA
Liquid temp. range5 to 180 C deg.
Max. supplied air pressure0.5 MPa

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